Bayesian inference analysis of ellipsometry data
نویسندگان
چکیده
منابع مشابه
Bayesian inference analysis of ellipsometry data.
Variable angle spectroscopic ellipsometry is a nondestructive technique for accurately determining the thicknesses and refractive indices of thin films. Experimentally, the ellipsometry parameters psi and Delta are measured, and the sample structure is then determined by one of a variety of approaches, depending on the number of unknown variables. The ellipsometry parameters have been inverted ...
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ژورنال
عنوان ژورنال: Physical Review E
سال: 1999
ISSN: 1063-651X,1095-3787
DOI: 10.1103/physreve.59.6138